SiC MOSFET (650V): Denso (equipped in LEXUS “RZ450e”) Inverter module Structure analysis Report

Introduction

・Toyota Lexus has announced the new model “RZ“, a fully electric battery EV (BEV) car model.

・The car adopts two motors (e-Axel), and the inverter of the rear unit is equipped with Denso’s SiC MOSFET.

Product features

This transistor is the largest SiC MOSFET in production (~80mm2) today.

Estimated to be able to deliver 200A current at 650V rating, implemented in Denso’s 2nd generation trench gate SiC MOSFET. (The first generation was adopted in the 2021 MIRAI FC converter).

・The SiC transistor integrates a current and a temperature sensor.

・Compared to other manufacturers, it uses a relatively thick gate oxide film and a large chip size. These are thought to be for reliability considerations.

Report content (Refer to Table of Contents in next pages)

(1)SiC MOSFET structural analysis report 　　　　

・ Package observation, chip observation

・ SiC MOSFET plane analysis: Wiring connection, layout

・ SiC MOSFET cross-sectional analysis: cell part, die edge part,

   *including cell part cross-sectional TEM structural observation.

(2) Option analysis: 　　

・SiC MOSFET cross-sectional SCM * + line analysis: channel, JFET, Epi layer, Buffer layer

   (*) SCM: Scanning Capacitance Microscopy

(3) SiC MOSFET process analysis report　　

・Estimation of manufacturing process flow and consideration of critical processes

・Evaluation of electrical characteristics, relationship between electrical characteristics and

　device structure

・ Comparison with MIRAI-equipped DENSO, ROHM, Wolfspeed, Infineon, SiC transistors.

Please contact us for report pricing.